Roller Furnace Silicon Wafer Atmosphere Test Protects Roller Furnace

Roller Furnace Silicon Wafer Atmosphere Test Protects Roller Furnace

Equipment application: mainly produce silicon wafer (156x156x0.2mm) for oxidation and dust-free production experiment 

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Description of this Roller Furnace Silicon Wafer Atmosphere Test Protects Roller Furnace
 
1.Equipment name: silicon wafer atmosphere protection experimental roller furnace
2.Equipment application: mainly produce silicon wafer (156x156x0.2mm) for oxidation and dust-free production experiment 
 
Parameters of this Roller Furnace Silicon Wafer Atmosphere Test Protects Roller Furnace
 
3.1 furnace size: 1380×500×100 (L×W×H)mm
3.2 overall size: 1980×1500×1100 (L×W×H) mm
3.3 rated temperature: 1300℃
3.4 operating temperature: 1000℃
3.5 temperature control accuracy: ≤±2℃
3.6 temperature difference in furnace: ≤±5℃
3.7 temperature outside the furnace: ≤±40℃
3.8 number of temperature control groups: 3 temperature control tables in 3 temperature zones
3.9 working speed: calculate the whole kiln according to 5min, 400mm/min,
3.10 speed regulation range: 120 ~ 700mm/min,
3.11 heating method: electric heating, the upper part of the furnace installation
Heating element: silicon carbon rod, upper mounting
3.13 heating power: 36 KW
3.14 insulation power: 25KW
Heating length: 1080mm
Furnace lining material: corundum material is adopted as furnace chamber in the furnace of the whole equipment
3.17 insulation material: light insulation brick and fiber cotton
3.18 insulation level: bottom 330mm, 350mm on both sides, and top 400mm
3.19 control cabinet: independent automatic control
3.20 equipment structure: 1 section
3.21 cooling mode: natural cooling
3.22 transmission mode: 45° bevel gear transmission
3.23 speed control: stepless frequency conversion control
3.24 intake category: nitrogen and oxygen 
 
Pictures of this Roller Furnace Silicon Wafer Atmosphere Test Protects Roller Furnace
 
Roller furnace silicon wafer atmosphere test protects roller furnace
Roller furnace silicon wafer atmosphere test protects roller furnace

 

 Roller furnace silicon wafer atmosphere test protects roller furnace

 

 

 

 

 

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